Abstract
In this chapter, we discuss the various elements of lumped-parameter modeling in MEMS devices. These include the stiffness of microstructures, the inertia elements, and the damping mechanisms of energy dissipation in microstructures. The forces affecting microstructures due to actuation and detection are another element, which is the subject of Chap. 3. The discussion here is focused mainly on linear modeling; nonlinear modeling is introduced in the following chapter.