Abstract
In this research micromachining is defined as the machining of workpiece having at least one of the dimensions in microns. In view of the increasing trend toward miniaturization, micromachining becomes an important activity in the fabrication of micro parts. Various technologies such as mechanical micromachining (micro drilling and micro milling), focused ion beam micromachining, laser micromachining are being used in microfabrication. Microfluidic devices and micro-channel heat exchangers etc. are a network of complex shaped channel system meant for the flow of micro, nano and even pico liter fluid for the micro mixing and analysis used in various applications including aerospace, automotive and biomedical applications. The fabrication of microfluidic devices is very complex because of the fact that it uses wide range of materials which are not compatible with conventional photolithographic techniques.