Abstract
Microbeams are perhaps the most commonly used structural component in MEMS. Microbeams form the backbone of a wide range of devices including resonators, resonant sensors, actuators, filters, atomic force microscope probes, and RF switches RF switches. They are also used as spring elements with other microstructures and MEMS components, such as comb-drive actuators. Because of their special place in MEMS, this chapter deals with the static and dynamic behavior and phenomena of microbeams in some depth.