Abstract
This chapter presents an overview and a refresher on the linear vibration principles of lumped-parameters systems, which are used to model MEMS. Since most microstructures undergo some sort of vibratory motion, the information presented here are fundamental to the understanding of many key aspects of MEMS dynamical behavior. Also, some of the methods to extract the parameters needed to model MEMS devices and structures require knowledge in the principles of vibrations. In addition, this chapter serves as a good introduction to the more advanced topics of nonlinear oscillations that will be discussed in the following chapters. The principles of operation of some MEMS devices, including accelerometers, gyroscopes, and band-pass filters, will be discussed here.