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n-Type beta-FeSi2/p-type Si Near-infrared Photodiodes Prepared by Facing-targets Direct-current Sputtering
Book chapter   Open access

n-Type beta-FeSi2/p-type Si Near-infrared Photodiodes Prepared by Facing-targets Direct-current Sputtering

Mahmoud Shaban and Tsuyoshi Yoshitake
pp.315-330
Intech Europe
01/01/2011

Abstract

Engineering Engineering, Electrical & Electronic Science & Technology Technology Telecommunications
url
https://doi.org/10.5772/14775View
Published (Version of record) Open

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