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A CMOS-compatible Large-Scale Monolithic Integration of Heterogeneous Multi-Sensors on Flexible Silicon for IoT Applications
Conference proceeding

A CMOS-compatible Large-Scale Monolithic Integration of Heterogeneous Multi-Sensors on Flexible Silicon for IoT Applications

Joanna M. Nassar, Galo A. Torres Sevilla, Seneca J. Velling, Marlon D. Cordero, Muhammad Mustafa Hussain and IEEE
2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)
IEEE International Electron Devices Meeting
01/01/2016

Abstract

Engineering Engineering, Electrical & Electronic Science & Technology Technology
We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.

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