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A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m degrees/s/root Hz Noise Floor
Conference proceeding

A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m degrees/s/root Hz Noise Floor

A. Elsayed, A. Elshennawy, A. Elmallah, A. Shaban, B. George, M. Elmala, A. Ismail, A. Wassal, M. Sakr, A. Mokhtar, …
2011 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC)
IEEE Custom Integrated Circuits Conference
01/01/2011

Abstract

Engineering Engineering, Electrical & Electronic Science & Technology Technology
An interface for MEMS gyroscope is implemented in 0.18 mu m HVCMOS technology, and achieves a low noise floor of 1m degrees/sec/root Hz over 200Hz BW. Electromechanical Sigma Delta forcefeed-back and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.

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