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ADVANCED PHOSPHOROUS EMITTERS FOR HIGH EFFICIENCY SI SOLAR CELLS
Conference proceeding

ADVANCED PHOSPHOROUS EMITTERS FOR HIGH EFFICIENCY SI SOLAR CELLS

T. Janssens, N. E. Posthuma, E. Van Kerschaver, K. Baert, P. Choulat, J. L. Everaert, J. Goosens, W. Vandervorst, J. Poortmans and IEEE
2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3, pp.1439-1443
IEEE Photovoltaic Specialists Conference
01/01/2009

Abstract

Energy & Fuels Science & Technology Technology
A homogeneous emitter designed for a high efficiency Si solar cell needs to fulfill specific requirements: (1) a low surface concentration of dopants and (2) a good contact resistance. The emitter formation is studied in detail for an optimized POCI(3) diffusion scheme and for plasma doping.

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