AFM scratching and metal deposition through insulating layers on silicon

Conference proceeding

Peer reviewed

L Santinacci, Y Zhang and P Schmuki

Surface science, Vol.597(1-3), pp.11-19

FEN Symposium Fundamentals of Electrochemical Nanotechnology: results from the Priority Program 1030 of the German Research Foundation (DFG)

15/12/2005

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties

Condensed matter: structure, mechanical and thermal properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Physics

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Title: AFM scratching and metal deposition through insulating layers on silicon
Creators - without role: L Santinacci - Friedrich-Alexander-Universität Erlangen-Nürnberg
Y Zhang - Friedrich-Alexander-Universität Erlangen-Nürnberg
P Schmuki - Friedrich-Alexander-Universität Erlangen-Nürnberg
Publication Details: Surface science, Vol.597(1-3), pp.11-19
Conference: FEN Symposium Fundamentals of Electrochemical Nanotechnology: results from the Priority Program 1030 of the German Research Foundation (DFG)
Publisher: Elsevier Science
Identifiers: 9934230008331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Conference proceeding