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Accurate reduced-order modeling of MEMS and NEMS microactuators under dynamic electrostatic loading and large strokes
Conference proceeding

Accurate reduced-order modeling of MEMS and NEMS microactuators under dynamic electrostatic loading and large strokes

Sarah Ben Sassi and Fehmi Najar
2015 IEEE 12th International Multi-Conference on Systems, Signals & Devices (SSD15), pp.1-5
01/03/2015

Abstract

cantilever doubly-clamped DQM FDM Mathematical model MEMS Micromechanical devices NEMS Nonlinear dynamical systems nonlinear linear Orbits Read only memory Reduced order systems Structural beams

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