Abstract
A fast Fourier transform (FFT)-accelerated integral equation solver for efficiently and accurately extracting inductance of structures discretized by voxels is described. This new solver called VoxHenry, unlike its predecessor FastHenry, can accurately account for the current flow around corners of structures using a carefully selected set of basis functions. VoxHenry solves the matrix system obtained upon discretization of the volume integral and current continuity equations iteratively. Matrix-vector multiplications required by the iterative solver are carried out using FFTs and the number of iterations is reduced using a sparse preconditioner. The accuracy and efficiency of VoxHenry are demonstrated via its application to inductance extraction of a circular coil.