An enhanced 90nm high performance technology with strong performance improvements from stress and mobility increase through simple process changes

R Khamankar; H BU; B Homung; J. P LU; P Nicollian; B Kirkpatrick; D Miles; M Hewson; D Farber; L Hall; H Alshareef; A Varghese; C Bowen; A Gurba; V Ukraintsev; B Rathsack; J Deloach; J Tran; C Kaneshige; M Somervell; S Aur; C Machala; T Grider; S Chakravarthi; P. R Chidambaram; M Bevan; A Krishnan; H Niimi; B Smith; J Blatchford

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An enhanced 90nm high performance technology with strong performance improvements from stress and mobility increase through simple process changes

R Khamankar, H BU, B Homung, J. P LU, P Nicollian, B Kirkpatrick, D Miles, M Hewson, D Farber, L Hall, …

pp.162-163

2004 Symposium on VLSI Technology (digest of technical papers)

Abstract

Applied sciences

Electronics

Exact sciences and technology

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

Transistors

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Title: An enhanced 90nm high performance technology with strong performance improvements from stress and mobility increase through simple process changes
Creators - without role: R Khamankar - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
H BU - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
B Homung - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
J. P LU - Texas Instruments
P Nicollian - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
B Kirkpatrick - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
D Miles - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
M Hewson - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
D Farber - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
L Hall - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
H Alshareef - Texas Instruments
A Varghese - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
C Bowen - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
A Gurba - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
V Ukraintsev - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
B Rathsack - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
J Deloach - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
J Tran - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
C Kaneshige - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
M Somervell - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
S Aur - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
C Machala - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
T Grider - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
S Chakravarthi - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
P. R Chidambaram - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
M Bevan - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
A Krishnan - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
H Niimi - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
B Smith - Texas Instruments, MS 3736, 13560 N. Central Expressway, Dallas, United States
J Blatchford - Texas Instruments
Publication Details: pp.162-163
Conference: 2004 Symposium on VLSI Technology (digest of technical papers)
Publisher: Business Center for Academic Societies
Identifiers: 9942008908331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Conference proceeding