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Comparative study for electrostatic MEMS converters
Conference proceeding

Comparative study for electrostatic MEMS converters

M.S. Salem, A.A. Zekry and H.F. Ragai
2009 National Radio Science Conference, pp.1-10
03/2009

Abstract

Capacitance Capacitors Electrostatics Fingers Micromechanical devices Performance analysis Springs Very large scale integration Vibrations Wireless sensor networks
The main objective of this paper is to compare between the two well-known electrostatic MEMS converters, which are the gap closing and overlap converters in order to select the most suitable one for energy scavenging system. This comparison carried out from three points of view: Firstly, by referring to the cited work, secondly by performing qualitative analysis between the two converters, finally by performing analytical calculation and simulation using ANSYS.

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