Abstract
The present is a study of a new active layer for ethanol (C2H5OH) vapour sensing devices based on copper oxide (CuO). CuO films were prepared by spray ultrasonic pyrolysis at a substrate temperature of 350 degrees C. Films microstructure was examined by X-ray diffraction and atomic force microscopy. Vapour-sensing testing was conducted using static vapour-sensing system, at different operating temperatures in the range of 100 degrees C to 175 degrees C for the vapour concentration of 300 ppm. The results show a high response of 45% at relatively low operating temperatures of 150 degrees C towards ethanol vapour.