Abstract
Sol-gel erbium doped barium titanate (Ba0.7Er0.3TiO3) thin films have been spun-coated on SiO2/Si and Pt/TiO2/SiO2/Si substrates, then characterized using X-ray diffractometer (XRD) and Sawyer-tower circuit to study the crystallinity and ferroelectric hysteresis loop, respectively. In XRD, lattice geometric equations have been applied to expose the lattice parameters for Ba0.7Er0.3TiO3 thin film, which show that the films hold tetragonal perovskite structure at room temperature. In addition, size-strain plot has been employed to the scanned patterns, which reveals that the films are nano-crystallized. The results obtained via sawyer-tower circuit confirm the ferroelectricity nature within the Ba0.7Er0.3TiO3 thin films, and the remnant polarization increase with increasing of film thickness.