Design of reconfigurable semiconductor manufacturing systems with maintenance and failure

Y. Tang; M.C. Zhou; IEEE

doi:10.1109/ROBOT.2001.932609

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Conference proceeding

Design of reconfigurable semiconductor manufacturing systems with maintenance and failure

Y. Tang, M.C. Zhou and IEEE

Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164), Vol.1, pp.559-564 vol.1

2001

DOI: https://doi.org/10.1109/ROBOT.2001.932609

Abstract

Adaptive algorithm

Algorithm design and analysis

Computer aided manufacturing

Design methodology

Electric breakdown

Heuristic algorithms

Manufacturing systems

Production systems

Semiconductor device manufacture

Throughput

Due to expensive, highly complex and time-consuming processes, semiconductor manufacturing systems have been given special attention. In Tang et al. (2000), a heuristic algorithm to design the reconfigurable automated production system was proposed. However, machine breakdowns and planned and unplanned maintenance were not considered. This paper extends that work and addresses the related design issues in reconfigurable back-end semiconductor manufacturing systems with failures and maintenance. Considering different conditions of machines, queuing network approaches are used to derive the throughput of machines to enhance the proposed virtual production line design methodology in which the throughput was originally computed using the deterministic-machine processing time. A priority is assigned to each idle machine according to its past performance and adaptive algorithms for reconfiguration are proposed.

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Details

Title: Design of reconfigurable semiconductor manufacturing systems with maintenance and failure
Creators - without role: Y. Tang - New Jersey Institute of Technology
M.C. Zhou - New Jersey Institute of Technology
IEEE
Publication Details: Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164), Vol.1, pp.559-564 vol.1
Publisher: IEEE
Identifiers: 9936254608331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Conference proceeding