Abstract
We study the static and dynamic behavior of electrically actuated micromachined arches. First, we conduct experiments on micromachined polysilicon beams by driving them electrically and varying their amplitude and frequency of voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Next, we conduct analytical and theoretical investigation to understand the experiments. First, we solve the Eigen value problem analytically. We study the effect of the initial rise on the natural frequency and mode shapes, and use a Galerkinbased procedure to derive a reduced order model, which is then used to solve both the static and dynamic responses. We use two symmetric modes in the reduced order model to have accurate and converged results. We use long time integration to solve the nonlinear ordinary differential equations, and then modify our model using effective length to match experimental results.
To further improve the matching with the experimental data, we curve-fit the exact profile of the microbeam to match the experimentally measured profile and use it in the reduced-order model to generate frequency-response curves.
Finally, we use another numerical technique, the shooting technique, to solve the nonlinear ordinary differential equations. By using shooting and the curve fitted function, we found that we get good agreement with the experimental data.