Abstract
The structural and optical properties of annealed CdS are studied in this work. The CdS films are deposited on ITO coated glasses by sputtering at different substrate temperatures and subsequently annealed in an O-2/N-2 ambient. It has been observed from XRD diffraction that the films show a trend of conversion from poly crystalline to amorphous or mixed phases after annealing. The films fabricated at room temperature ( RT) have been found in complete amorphous form. The surface roughness of the films drastically increased due to thermal annealing observed from AFM images. Optical properties of the films were observed using UV-Vis spectrometer and band gaps of the films were found in the range of 2.80 to 3.08 eV. The annealed films exhibited the blue shift in the direct allowed transition energy band gaps, possibly due to the oxygen incorporation during annealing suggesting the transformation to CdS:O films.