Abstract
Multiwalled Carbon Nanotubes (MWCNs) were synthesized using double-furnace thermal chemical vapor deposition technique at 700 - 900 degrees C on porous silicon nanostructure (PSiNs). Palm oil used as a carbon natural source, ferrocene as a catalyst and nitrogen gas as a carrier gas. The precursor were vaporized at 475 degrees C carried by nitrogen gas which flow at constant rate 150 sccm/min. Carbon nanotubes characterized by using Raman Spectroscopy and field emission scanning electron microscopy (FESEM) to check its structure and crystallites before tested with I-V probe. Au contact used as a metal contact deposited on CNTs layer. Carbon nanotubes (CNTs) with uniform diameter were found grown on porous silicon for each temperature used. Based on micro-Raman spectroscopy result, the peak of carbon nanotubes (around 1 300 to 1 600 nm) was detected. The I-V characteristic of CNTs deposited had different profile when deposited at different temperature.