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Electron beam lithographic techniques and electrochemical reactions for the micro- and nanostructuring of surfaces under extreme conditions
Conference proceeding   Peer reviewed

Electron beam lithographic techniques and electrochemical reactions for the micro- and nanostructuring of surfaces under extreme conditions

T Djenizian and P Schmuki
Journal of electroceramics, Vol.16(1), pp.9-14
Summer school on electrochemistry and nanotechnology
01/02/2006

Abstract

Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of nanofabrication Nanolithography Physics

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