Electron cyclotron resonance etching of GaAs vias for monolithic microwave integrated circuits

Conference proceeding

Peer reviewed

Y. W Chen, B. S Ooi and G. I NG

Optical materials (Amsterdam), Vol.14(3), pp.223-227

Materials, devices and applications for advanced optical communication (Symposium K)

01/07/2000

Abstract

Applied sciences

Circuit properties

Electric, optical and optoelectronic circuits

Electronics

Exact sciences and technology

Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits

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Title: Electron cyclotron resonance etching of GaAs vias for monolithic microwave integrated circuits
Creators - without role: Y. W Chen - Nanyang Technological University
B. S Ooi - Nanyang Technological University
G. I NG - Nanyang Technological University
Publication Details: Optical materials (Amsterdam), Vol.14(3), pp.223-227
Conference: Materials, devices and applications for advanced optical communication (Symposium K)
Publisher: Elsevier Science
Grant note: International Union of Materials Research Societies
Identifiers: 9941941908331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Conference proceeding