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Electron spin resonance study of radiation-induced point defects in nitrided and reoxidized nitrided oxides
Conference proceeding   Peer reviewed

Electron spin resonance study of radiation-induced point defects in nitrided and reoxidized nitrided oxides

J. T Yount, P. M Lenahan and G. J Dunn
IEEE transactions on nuclear science, Vol.39(6), pp.2211-2219
IEEE Annual International nuclear and space radiation effects conference
01/12/1992

Abstract

Applied sciences Electronics Exact sciences and technology Interfaces Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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