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Enhancement on Crystallinity Property of Low Annealed PbTiO3 Thin Films for Metal-insulator-metal Capacitor
Conference proceeding   Peer reviewed

Enhancement on Crystallinity Property of Low Annealed PbTiO3 Thin Films for Metal-insulator-metal Capacitor

Z. Nurbaya, M. H. Wahid, M. D. Rozana, S. A. H. Alrokayan, H. A. Khan and M. Rusop
8TH INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY 2017 (NANO-SCITECH 2017), Vol.1963(1)
AIP Conference Proceedings
09/05/2018
DOI: https://doi.org/10.1063/1.5036872

Abstract

Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics
This study presents the investigation on crystallinity property of PbTiO3 thin films towards metal-insulator-metal capacitor device fabrication. The preparation of the thin films utilizes sol-gel spin coating method with low annealing temperature effect. Hence, structural and electrical characterization is brought to justify the thin films consistency.

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