Abstract
Electrostatic MEMS actuators suffer from a limited travel range to nearly one-third of the initial electrostatic gap distance because of the nonlinearity of the electrostatic force. This limitation, that restrict its performances, can be extended by controlling its stability through a series of adjustable capacitors. We develop a mathematical model of the system that incorporates all nonlinearities in order to represent a more realistic model. Static and transient analysis of the design are explored for their range of stable solutions. The simulation results show that the introduced linear controller can extend the range of travel up to 96% of its initial value.