Formation of composite ternary nitride thin films by magnetron sputtering co-deposition

Conference proceeding

Peer reviewed

C. S Sandu, R Sanjines, M Benkahoul, F Medjani and F Levy

Surface & coatings technology, Vol.201(7), pp.4083-4089

Proceedings of the 33rd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2006), San Diego, California, May 1-5, 2006

20/12/2006

Abstract

Applied sciences

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Metals. Metallurgy

Methods of deposition of films and coatings; film growth and epitaxy

Physics

Production techniques

Surface treatment

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Title: Formation of composite ternary nitride thin films by magnetron sputtering co-deposition
Creators - without role: C. S Sandu - École Polytechnique Fédérale de Lausanne
R Sanjines - École Polytechnique Fédérale de Lausanne
M Benkahoul - École Polytechnique Fédérale de Lausanne
F Medjani - École Polytechnique Fédérale de Lausanne
F Levy - École Polytechnique Fédérale de Lausanne
Publication Details: Surface & coatings technology, Vol.201(7), pp.4083-4089
Conference: Proceedings of the 33rd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2006), San Diego, California, May 1-5, 2006
Publisher: Elsevier
Identifiers: 9930336508331
Academic Unit: Taibah University
Language: English
Resource Type: Conference proceeding