Abstract
In this study, we report the significant enhancement of high-frequency performance of solenoid inductors incorporated [Fe80Ni20-O/SiO2](n) magnetic multilayer film prepared by magnetron sputtering as magnetic core over their air-core counterparts. The integrated solenoid inductor with multilayered magnetic core revealed excellent high-frequency performance in a wide operation frequency range of 0-4 GHz, and acquired a peak inductance density of 72 nH/mm(2). Compared to their air-core solenoid inductors with equivalent geometry, there were more than 35-fold enhancement for inductance and 24-fold enhancement for peak quality factor of the 21-turn integrated solenoid inductor with multilayered magnetic core operating at 1.5 GHz. The results indicated that the multilayer magnetic core had promising prospect for applications in GHz frequency electromagnetic devices.