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Investigation of ion implanted electroplated chromium from a trivalent bath
Conference proceeding

Investigation of ion implanted electroplated chromium from a trivalent bath

A. H. Hamdi, G. W. Malaczynski, A. A. Elmoursi, C. H. Leung, A. B. Campbell, D. Shpuniarsky, S. J. Simko, M. C. Militello, M. P. Balogh and J. H. Lindsay
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol.17(2), pp.828-831
Papers from the fourth international plasma-based ion implantation workshop
01/03/1999

Abstract

Cr

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