LAVA web-based remote simulation: enhancements for education and technology innovation

Sang Il Lee; Ka Chun Ng; Takashi Orimoto; Jason Pittenger; Toshi Horie; Konstantinos Adam; Mosong Cheng; Ebo H Croffie; Yunfei Deng; Frank E Gennari; Thomas V Pistor; Garth Robins; Mike V Williamson; Bo Wu; Lei Yuan; Andrew R Neureuther; Kim Choon Ng

doi:10.1117/12.435691

Conference proceeding

LAVA web-based remote simulation: enhancements for education and technology innovation

Sang Il Lee, Ka Chun Ng, Takashi Orimoto, Jason Pittenger, Toshi Horie, Konstantinos Adam, Mosong Cheng, Ebo H Croffie, Yunfei Deng, Frank E Gennari, …

Proceedings of SPIE, Vol.4346(1), pp.1500-1506

Optical Microlithography XIV

14/09/2001

DOI: https://doi.org/10.1117/12.435691

Abstract

The Lithography Analysis using Virtual Access (LAVA) web site at http://cuervo.eecs.berkeley.edu/Volcano/ has been enhanced with new optical and deposition applets, graphical infrastructure and linkage to parallel execution on networks of workstations. More than ten new graphical user interface applets have been designed to support education, illustrate novel concepts from research, and explore usage of parallel machines. These applets have been improved through feedback and classroom use. Over the last year LAVA provided industry and other academic communities 1,300 session and 700 rigorous simulations per month among the SPLAT, SAMPLE2D, SAMPLE3D, TEMPEST, STORM, and BEBS simulators.

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Title: LAVA web-based remote simulation: enhancements for education and technology innovation
Creators - without role: Sang Il Lee - University of California, Berkeley
Ka Chun Ng - Univ. of California/Berkeley (USA)
Takashi Orimoto - University of California, Berkeley
Jason Pittenger - University of California, Berkeley
Toshi Horie - University of California, Berkeley
Konstantinos Adam - Univ. of California/Berkeley (USA)
Mosong Cheng - Univ. of California/Berkeley (USA)
Ebo H Croffie - University of California, Berkeley
Yunfei Deng - University of California, Berkeley
Frank E Gennari - University of California, Berkeley
Thomas V Pistor - Univ. of California/Berekely (USA)
Garth Robins - University of California, Berkeley
Mike V Williamson - University of California, Berkeley
Bo Wu - University of California, Berkeley
Lei Yuan - Univ. of California/Berkeley (USA)
Andrew R Neureuther - University of California, Berkeley
Kim Choon Ng - King Abdullah University of Science & Technology
Publication Details: Proceedings of SPIE, Vol.4346(1), pp.1500-1506
Conference: Optical Microlithography XIV
Identifiers: 9945495108331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Conference proceeding