Abstract
In the past few years, with the advance of laser technology, laser engraving has been considered as an alternative method to traditional lithography in the fabrication of microfluidic devices. Considering solution-based method as the main technique for perovskite deposition, the capillary motion of perovskite precursor can be employed for filling a laser-engraved patterned conducting layer. Herein, we used CO2 laser micromachining for the fabrication of the perovskite photodetector. First, several microchannels were formed by laser engraving of indium tin oxide (ITO) coated polyethylene terephthalate (PET) substrates. Power, speed and frequency parameters of the laser were varied in order to achieve the desired channel roughness. The samples were characterized by scanning electron microscope (SEM) and potentiostat. The I-V characteristics and bode plots of the sample showed a capacitive and an inductive behavior. Finally, a simulation tool was used to analyze the experimental data. This approach offers a simple, rapid and low-cost fabrication method for perovskite photodetector and can be used in large-scale commercial application.