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Laser reflectometry in situ monitoring of InGaAs grown by atmospheric pressure metalorganic vapour phase epitaxy
Conference proceeding   Peer reviewed

Laser reflectometry in situ monitoring of InGaAs grown by atmospheric pressure metalorganic vapour phase epitaxy

M. M Habchi, A Rebey, A Fouzri and B EL JANI
Applied surface science, Vol.253(1), pp.275-278
Proceedings of the E-MRS 2005 spring meeting symposium P: Current trends in optical and X-ray metrology of advanced materials for nanoscale devices, Strasbourg, France, May 31-June 3, 2005
31/10/2006
DOI: https://doi.org/10.1016/j.apsusc.2006.05.088

Abstract

Absorption and reflection spectra: visible and ultraviolet Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Physics Single-crystal and powder diffraction Structure of solids and liquids; crystallography Vapor phase epitaxy; growth from vapor phase Visible and ultraviolet spectra X-ray diffraction and scattering

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