Abstract
A simple valveless micropimp is fabricated using optical lithography and copper electroplating. The micropump is activated by magnetic force produced by two opposite spiral flat coils. Each coil consists of 30 tracks with 6mm diameter and 320m2 cross section. The micropump is fabricated between the two flat coils. By applying a square wave signal to the coils, they generate an alternative magnetic field, which contracts and expands the pumping chamber repeatedly causing the liquid in the pump to flow. Increasing the activating frequency, up to 300Hz, appears to increase the flow rate. Increasing the applied current, which is limited to the cross-section of the coil tracks, will increase the magnetic force and hence improve the pumping rate.