Abstract
The cost of fabricating micro-devices and systems is an important factor in the development of new products and systems. It is important for researchers to be able to budget expenses when submitting proposals. Likewise, it is also important from an operations point of view. The cost of running a typical Microelectromechanical (MEMS) process in eight different academic micro and nanofabrication facilities has been calculated by "virtually" performing fabrication processes at these facilities. The different charging mechanisms in place have been presented as have been different charge tiers and rates. Due to the different recharge structures, a computer application has been developed to streamline the cost estimation of fabrication.