Abstract
In this paper, an air core meander transformer has been designed, micromachined and characterized. The single layer planar transformer is designed for wireless high frequency applications. The transformer is fabricated using single metal layer through standard low-cost MetalMUMPs process. The air core meander transformer exhibits low design complexity due to its single layer design and avoids proximity losses and unbalance magnetic flux distribution as compare to spiral air core transformers. The fabricated device has relatively low footprint (1.9 mm 2 ) which provide reduced cost with less fabrication complexity. The proposed mems transformer design can find its application in lab on chip industry. Due to the spiral shape of the meander transformer, it can be used in stretchable electronics. Furthermore, it's can be used particularly as magnetic actuator in wireless biomedical sensors. Low resistance of meander transformer makes it suitable for high power density application and compatible with the integrated circuit technology.