Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Conference proceeding

Peer reviewed

C. S Sandu, M Benkahoul, M PARLINSKA-WOJTAN, R Sanjines and F Levy

Surface & coatings technology, Vol.200(22-23), pp.6544-6548

Proceedings of Symposium K on Protective Coatings and Thin Films, E-MRS 2005 Conference, Strasbourg, France, May 31-June 3, 2005

20/06/2006

Abstract

Applied sciences

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology

Metals. Metallurgy

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Title: Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering
Creators - without role: C. S Sandu - École Polytechnique Fédérale de Lausanne
M Benkahoul - École Polytechnique Fédérale de Lausanne
M PARLINSKA-WOJTAN - École Polytechnique Fédérale de Lausanne
R Sanjines - École Polytechnique Fédérale de Lausanne
F Levy - École Polytechnique Fédérale de Lausanne
Publication Details: Surface & coatings technology, Vol.200(22-23), pp.6544-6548
Conference: Proceedings of Symposium K on Protective Coatings and Thin Films, E-MRS 2005 Conference, Strasbourg, France, May 31-June 3, 2005
Publisher: Elsevier
Identifiers: 9929867708331
Academic Unit: Taibah University
Language: English
Resource Type: Conference proceeding