Abstract
We present a novel laser processing technique to produce nanodielectric films, which are based on polymer coated metal nanoparticles. The polymer-coated Au NP composite was spin-coated onto a nickel foil serving as the bottom electrode and aluminum was used as the capacitor top electrode. We will also present a second approach towards achieving high-k dielectric structures by embedding metals (i.e., Au, Ag) into low dielectric materials (i.e., BN) with proven high breakdown and low loss properties using traditional thin film deposition methods. The large difference in lattice constant, thermal coefficient and wetting behavior between a metal and a dielectric material usually results in 3D growth for the metal layers. Post growth annealing can further develop this geometry and yield metal nanostructures (nanodots) embedded in the dielectric layers. Studies on capacitance measurements, TAS for density and energy of trapping centers, and IVT measurements for the energy of the dominant leakage path and relative magnitude of leakage current are currently underway and their results will be presented at the conference.