Abstract
Conference Title: 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Conference Start Date: 2017, April 9 Conference End Date: 2017, April 12 Conference Location: Los Angeles, CA, USA We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.