Abstract
We focus in this paper on the modeling and dynamical analysis of a tapping mode atomic force microscopy (AFM) microcantilever beam. This latter is subjected to a harmonic excitation of its base displacement and to Van der Waals and DMT contact forces at its free end. For AFM design purposes, we derive a mathematical model for accurate description of the AFM microbeam dynamics. We solve the resulting equations of motions and associated boundary conditions using the Galerkin method. We find that using one-mode approximation in tapping mode operating in the neighborhood of the contact region one-mode approximation may lead to erroneous results.