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Off-axis low coherence interferometry for surface topology measurement
Conference proceeding

Off-axis low coherence interferometry for surface topology measurement

Yves Delacretaz, Daniel Boss, Florian Lang and Christian Depeursinge
SPECKLE 2010: OPTICAL METROLOGY, Vol.7387(1), pp.738715-738719
Proceedings of SPIE
01/01/2010

Abstract

Instruments & Instrumentation Optics Physical Sciences Science & Technology Technology
In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

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