Abstract
This paper presents a performance comparison of three commonly-used MEMS springs: Double-folded, U-shaped and fish-hook, which are attached each to a same-size proof-mass constituting a mass-spring resonating system oscillating in-plane at 10 kHz. ANSYS Finite Element Analysis (FEA) is performed in order to compare the modal and static analysis among the springs. The effect of fabrication imperfection is also included in the comparison. It is found out that the analyzed Double Folded Beam (DFB) spring demonstrated strongest immunity of about 1% frequency deviation to MEMS fabrication imperfections and against off-axis errors.