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Performance enhancement of grap closing electrostatic MEMS converters
Conference proceeding

Performance enhancement of grap closing electrostatic MEMS converters

Mona S. Salem, Marwa S. Salem, A. A. Zekry and H. F. Ragai
2006 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS, p.45
01/01/2006
DOI: https://doi.org/10.1109/ICMENS.2006.348214

Abstract

Engineering Engineering, Electrical & Electronic Engineering, Mechanical Nanoscience & Nanotechnology Optics Physical Sciences Science & Technology Science & Technology - Other Topics Technology
This paper proposes new ideas to enhance the output power of the gap closing electrostatic MEMS converters. This will be done by including the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter will be increased by increasing the converter thickness.

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