Pulsing a low pressure radiofrequency discharge

Conference proceeding

Open access

Peer reviewed

H. B Smith, C Charles, R. W Boswell and H Kuwahara

JSME international journal. Series B, fluids and thermal engineering, Vol.41(2), pp.424-428

1998

Abstract

Applied sciences

Atomic and molecular physics

Atomic properties and interactions with photons

Atomic spectra

Circuit properties

Electric discharges

Electric, optical and optoelectronic circuits

Electrical properties (ionization, breakdown, electron and ion mobility, etc.)

Electronic circuits

Electronics

Exact sciences and technology

Oscillators, pulse generators, and function generators

Oscillators, resonators, synthetizers

Physics

Physics of gases

Physics of gases, plasmas and electric discharges

Physics of plasmas and electric discharges

Radio-frequency, microwave, and infrared spectra

url

https://doi.org/10.1299/jsmeb.41.424View

Published (Version of record) Open

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Title: Pulsing a low pressure radiofrequency discharge
Creators - without role: H. B Smith - Space Plasma and Plasma Processing, Plasma Research Laboratory, RSPhysSE. The Australian National University, ACT 0200, ACT, Australia
C Charles - Space Plasma and Plasma Processing, Plasma Research Laboratory, RSPhysSE. The Australian National University, ACT 0200, ACT, Australia
R. W Boswell - Space Plasma and Plasma Processing, Plasma Research Laboratory, RSPhysSE. The Australian National University, ACT 0200, ACT, Australia
H Kuwahara - Nissin Electric Co., Ltd., Research and Development Division, 47 Umezu-Takase Cho, Ukyo-ku, Kyoto 615 0906, Japan
Publication Details: JSME international journal. Series B, fluids and thermal engineering, Vol.41(2), pp.424-428
Publisher: Japan Society of Mechanical Engineers
Identifiers: 9944584408331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Conference proceeding