Abstract
Nano-magnesium oxide (Nano-MgO) had successfully deposited on glass substrate using sol-gel spin coating technique at different drying temperature (100, 200 and 300 degrees C). The dielectric layer properties of deposited nano-MgO films were investigated in terms of its resistivity, leakage current density, relative permittivity, topology and morphology respectively. Changing in drying temperature resulted in variation of nano-MgO films properties and film dried at 200 degrees C has compact, uniform, less porous and in nano size that lead to the enhancement in relative permittivity value.