Abstract
We employed the postgrowth impurity-free vacancy diffusion technique to selectively tune the bandgap of the InAs/InGaAlAs dots-in-well laser structure grown on (100) InP substrate. A blueshift up to 170 nm with a significant decrease in the photoluminescence linewidth has been observed. Spatial control of the bandgap shifts has been achieved using SiO2 and SixNy layers as annealing caps. A differential wavelength shift of 76 nm has been observed after a rapid thermal annealing step at 750 degrees C for 30 s. In contrast to most reported results in other material systems using similar process, we observed a larger bandgap shift from the SixNy capped samples than from the SiO2 capped samples. Our theoretical calculation indicates that the unusual intermixing behavior in this material system is governed by different interdiffusion rates of group-III atoms.