Abstract
IMPATT diodes were designed and fabricated in standard CMOS technology to study the impact of the RMS value of surface roughness on the avalanche frequency. By comparing the on-chip measurements of an IMPATT diode integrated in a CPW to an integrated one with a microstrip patch antenna at the same biasing conditions, the results demonstrated a reduction in the avalanche frequency in the antenna integrated structure by 34% compared to the CPW one. Such variation is strongly associated with the increase in the conduction losses by 40%similar to 80% based on the biasing conditions and hence the avalanche frequency.