The effect of metal thickness, overlayer and high-k surface treatment on the effective work function of metal electrode

K Choi; H C Wen; H Alshareef; R Harris; P Lysaght; H Luan; P Majhi; B H Leee

doi:10.1109/ESSDER.2005.1546595

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Conference proceeding

The effect of metal thickness, overlayer and high-k surface treatment on the effective work function of metal electrode

K Choi, H C Wen, H Alshareef, R Harris, P Lysaght, H Luan, P Majhi and B H Leee

PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, Vol.2005, pp.101-104

Proceedings of the European Solid-State Device Research Conference

01/01/2005

DOI: https://doi.org/10.1109/ESSDER.2005.1546595

Abstract

Engineering

Engineering, Electrical & Electronic

Instruments & Instrumentation

Physical Sciences

Physics

Physics, Condensed Matter

Science & Technology

Technology

We demonstrate that the effective work function (EWF) of atomic layer deposited (ALD) TiN electrodes is a function of the TiN film thickness and that the metal/dielectric interface and the bulk metal film influence this measured response. It is shown that anneal treatments and chemical processing of the underlying dielectric surface prior to electrode deposition may be exploited to modify the effective work function of metal electrodes. The effect of physical vapor deposited (PVD) and ALD metal over-layers on the effective work function of metal electrodes is also presented.

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Title: The effect of metal thickness, overlayer and high-k surface treatment on the effective work function of metal electrode
Creators - without role: K Choi
H C Wen
H Alshareef
R Harris - Advanced Micro Devices
P Lysaght
H Luan
P Majhi - Intel
B H Leee
Contributors - without role: G Ghibaudo
T Skotnicki
S Cristoloveanu
M Brillouet
Publication Details: PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, Vol.2005, pp.101-104
Series: Proceedings of the European Solid-State Device Research Conference
Publisher: IEEE
Number of pages: 4
Identifiers: 9945891608331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Conference proceeding