The growth of thin ti films on Si(111)-(7x7) surfaces

Conference proceeding

A A Saleh and L D Peterson

SILICIDE THIN FILMS - FABRICATION, PROPERTIES, AND APPLICATIONS, Vol.402, pp.523-528

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

01/01/1996

Abstract

Materials Science

Materials Science, Coatings & Films

Science & Technology

Technology

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Title: The growth of thin ti films on Si(111)-(7x7) surfaces
Creators - without role: A A Saleh
L D Peterson
Contributors - without role: R T Tung
K Maex
P W Pellegrini
L H Allen
Publication Details: SILICIDE THIN FILMS - FABRICATION, PROPERTIES, AND APPLICATIONS, Vol.402, pp.523-528
Series: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Publisher: Materials Research Soc
Number of pages: 6
Identifiers: 9928912708331
Academic Unit: Qassim University
Language: English
Resource Type: Conference proceeding