Abstract
In this paper we proposed three different SPICE models for the electrostatics MEMS converter. Such converters are used in the energy scavenging system for wireless sensor nodes. Each model will be presented and a comparison between the three models will be carried out. The best model will be the one which well represents the behavior of the electrostatic MEMS converter. So by using this model one can study the interaction between the converter and the energy scavenging system.