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A new omega filter electron microscope at 300 kV
Journal article   Peer reviewed

A new omega filter electron microscope at 300 kV

Y Bando, M Mitome, Y Kitami, K Kurashima, T Kaneyama, Y Okura and M Naruse
MICROSCOPY OF SEMICONDUCTING MATERIALS 2001, (169), pp.41-44
INSTITUTE OF PHYSICS CONFERENCE SERIES
01/01/2001

Abstract

Microscopy Physical Sciences Physics Physics, Multidisciplinary Science & Technology Technology
Recently we have developed a new energy-filtered microscope that is working at 300 W. The medium voltage range of 300 or 400 kV has big advantages in resolution and analytical capabilities as compared to those of 200 kV, Even in the inelastic filtered images, the resolution is improved at medium voltages. Some observation examples are shown in this article.

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