Abstract
Micro/nano-electromechanical resonator based logic computation has attracted significant attention in recent years due to its dynamic mode of operation, ultra-low power consumption, and potential for reprogrammable and reversible computing. Here we demonstrate a 4-bit parity checker circuit by utilizing recently developed logic gates based on MEMS resonators. Toward this, resonance frequencies of shallow arch shaped micro-resonators are electrothermally tuned by the logic inputs to constitute the required logic gates for the proposed parity checker circuit. This study demonstrates that by utilizing MEMS resonator based logic elements, complex digital circuits can be realized. (C) 2017 Elsevier B.V. All rights reserved.