Abstract
Multilayer Barium Strontium Titanate (BST) sol-gel films with molar formula BaxSr1-xTiO3 (x = 0.5, 0.7 and 0.8) are deposited on SiO2/Si substrates. The surface morphology and grain size are characterized via Atomic Force Microscope (AFM), showing the films to be uniform and crack-free. The average roughness, maximum peak to valley height, root mean square (RMS) roughness, ten-point mean height roughness, surface skewness and surface kurtosis parameters are used to analyze the surface morphology of the BST thin films. Generally, the results show that the surface roughness increases with decreasing Sr content with RMS roughness increasing from 4.77 nm to 6.52 nm for films of 160.8 nm thickness as Sr content decreases. Surface roughness also increases with the film thickness, for x = 0.5, RMS roughness increases from 4.77 nm to 13.33 nm as the film thickness increases from 160.8 nm to 446.8 nm. A similar trend for surface roughness is obtained, for all x values, as is for grain size.